Beilstein J. Nanotechnol.2017,8, 358–371, doi:10.3762/bjnano.8.38
, M2 and M4 and location 2 for the torsional mode M3.
The system response (Vi→Vo) is the combination of a motional and feedthrough component. To observe the motional component feedthroughcancellation is performed offline. A third order transfer function is fitted to the measured frequency response in
system response with feedthroughcancellation (Vi→Vd). Due to small phase shifts from the op-amp dynamics and unmodeled electrical parasitics, feedthroughcancellation can only be accurately performed in a narrow-band in the vicinity of the mode of interest.
To evaluate the effect of the proposed
small magnitude of resonance response. The parameters of Equation 21 and Equation 23 for each of these transfer functions are tabulated in Table 3.
The resulting magnitude responses with the feedthroughcancellation from input voltage Vi to sensor output Vd, are shown in Figure 6i–l (voltage driven) and
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Figure 1:
The dimensions of the basic cantilever design. The gray zone is the piezoelectric layer. The zoomed...
Beilstein J. Nanotechnol.2016,7, 284–295, doi:10.3762/bjnano.7.26
simultaneously used for multimode excitation and detection of the cantilever deflection. This is achieved by a charge sensor with a bandwidth of 10 MHz and dual feedthroughcancellation to recover the resonant modes that are heavily buried in feedthrough originating from the piezoelectric capacitance. The setup
fundamental mode, and phase imaging on the higher eigenmode.
Keywords: atomic force microscopy; charge sensing; feedthroughcancellation; multimode sensor; piezoelectric cantilever; self-sensing; Introduction
Emerging methods in multifrequency atomic force microscopy (MF-AFM) rely on the detection and
, an impedance analyzer such as the Keysight E4990A was used to measure Cp and the obtained value of 20.27 pF adequately matches the estimation.
Feedthroughcancellation
The first and the fifth modes are clearly visible in the frequency response shown in Figure 6c albeit excessively buried in
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Figure 1:
Simplified cross-section schematic of a beam with bonded piezoelectric layer. An electric field E3 ...